About: http://webisa.webdatacommons.org/343467803

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One of the advantages of the present invention is a solution to the counter-doping problem by using TiN to connect poly to poly or to moat, preventing counterdiffusion through the local interconnect (which acts as a diffusion barrier).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com