PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Depending on the material composition of the substrate 22, an additional layer, such as silicon dioxide or other suitable material, may need to be grown or deposited onto the upper surface thereof prior to the bonding step in order to provide a suitable layer to bond with the silicon dioxide layer 30 disposed on the bottom of wafer 20.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com