About: http://webisa.webdatacommons.org/344511367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Beams 2, first interlocking-L element 70, second interlocking element 72, and extensible positioners 86 are monolithically formed from a solid layer of x-ray lithographically deposited material such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com