About: http://webisa.webdatacommons.org/344577242

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring now to FIG. 3, the substrate 22 may comprise glass or any other insulating material, including high resistivity silicon, crystalline sapphire, or ceramic such as alumina, aluminum nitrite, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au