PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Desirable in the art is a method whereby polysilicon capacitors of reduced surface area in comparison with conventional planar polysilicon capacitors may be formed within advanced integrated circuits while simultaneously maintaining or increasing the capacitance of those polysilicon capacitors.
http://www.w3.org/ns/prov#wasQuotedFrom
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