PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • A first step 110 is to provide an alloy target or targets from which the magnetic thin films of the invention are to be deposited, e.g., via chemical deposition or via physical deposition such as sputtering, evaporation, molecular beam epitaxial growth, ion beam deposition and laser ablation.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com