About: http://webisa.webdatacommons.org/34502640

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to systems for collecting and analyzing data and using analysis of data for performance monitoring and in particular to the use of such systems on tools that process substrates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com