PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Etching is a process similar to cleaning except these processes typically remove microns of material and often use much more aggressive plasma chemistry.
http://www.w3.org/ns/prov#wasQuotedFrom
  • nordson.com