About: http://webisa.webdatacommons.org/34524578

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The doped polysilicon plugs 220 may be formed by deposition of doped polysilicon material on the structure of FIGS. 9A-9B followed by a planarization process such as Chemical Mechanical Polishing CMP.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com