About: http://webisa.webdatacommons.org/34528569

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When a semiconductor film such as silicon is deposited by CVD on top of an underlevel protection layer, the very first stage in film formation is the generation of many nuclei on top of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com