About: http://webisa.webdatacommons.org/345613945

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	-channel TFT. It is noted that the doping conditions such as the dosage and the acceleration voltage are controlled so that the gate insulating film 564 functions as a semi-permeable mask during the doping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com