About: http://webisa.webdatacommons.org/346439292

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	wherein the acceptor impurity element is boron, and wherein the dopant gas is a gas selected from the group consisting of trimethylboron, B2H6, BF3, BCl3, and BBr3. 22.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es