About: http://webisa.webdatacommons.org/346669967

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Fluorocarbons, sulphur hexafluoride, argon, methane/hydrogen and chlorine chemistries such as boron trichloride are examples of materials which can be used to punch through the cathode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au