About: http://webisa.webdatacommons.org/346863776

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A spacer then is formed on the sidewalls of the gate and the channel by deposition and non-isotropic etching of a dielectric such as silicon oxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com