| http://www.w3.org/ns/prov#value | - The coefficients.alpha..sub.mns and .beta..sub.mns are determined by minimizing the 2-norm of the residual Res.sub.Fl(s, x.sub.f, y.sub.f, x.sub.w, y.sub.w) in equation (3).It should be noted that the across-wafer variation can be determined by any other process also including the process described in the other embodiments described in U.S. patent application Ser.
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