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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, preferred examples of the section and unit 322 are disclosed in U.S. Pat. No. 4,985,722 to Ushijima et al., entitled Apparatus for Coating a Photo-Resist Film and/or Developing It after Being Exposed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com