About: http://webisa.webdatacommons.org/347196922

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ellipsometry is a technique that measures the change in polarization state of a beam of light on reflection from a surface.
http://www.w3.org/ns/prov#wasQuotedFrom	illinois.edu