About: http://webisa.webdatacommons.org/347381734

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	PECVD requires control and optimization of several deposition parameters, including rf power density, frequency, and duty cycle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com