About: http://webisa.webdatacommons.org/347516003

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It will also be understood by those having skill in the art that the cover 23 may be formed upon a substrate, such as a silicon wafer or a glass wafer, and separated from the substrate after the bonding process is complete.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com