| http://www.w3.org/ns/prov#value | - e time required to transfer a workpiece to be polished or a polished workpiece, such as a semiconductor wafer, between the reversing device and the top ring, for thereby greatly increasing the number of processed workpieces per unit time, i.e., throughput. [0572] Further, when the workpiece is transferred between the stage of the linear transporter and the reversing device, the workpiece is transf
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