About: http://webisa.webdatacommons.org/348327392

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIGS. 18 through 24, a third embodiment is a method of correcting a pattern defect in a phase shift mask having a shifter divot defect 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk