| http://www.w3.org/ns/prov#value | - Representative lower-k dielectric polymer includes but is not limited to polystyrene, poly(4-methylstyrene), poly(chlorostyrene), poly(??-methylstyrene), polysiloxane such as poly(dimethyl siloxane) and poly(diphenyl siloxane), polysilsesquioxane such as poly(ethylsilsesquioxane), poly(methyl silsesquioxane), and poly(phenyl silsesquioxane), polyphenylene, poly(1,3-butadiene), poly(??-vinylnaphtha
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