About: http://webisa.webdatacommons.org/34869907

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The patterning step may comprise techniques such as photolithography or electron beam lithography and image transfer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com