About: http://webisa.webdatacommons.org/34880656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 4, wherein the second insulating layer is a single layer or a multi-layer containing a polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com