About: http://webisa.webdatacommons.org/348889013

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	exposure apparatus, and method of manufacturing deviceUS728018520 Abr 20069 Oct 2007Canon Kabushiki KaishaStage system including fine-motion cable unit, exposure apparatus, and method of manufacturing deviceUS7330093 *11 Oct 200512 Feb 2008Canon Kabushiki KaishaAlignment apparatus, exposure apparatus, and device manufacturing methodUS78520346 Abr 200514 Dic 2010Nikon CorporationDrive method of mov
http://www.w3.org/ns/prov#wasQuotedFrom	google.es