About: http://webisa.webdatacommons.org/34906802

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 15, wherein the material is a metal and the coating is one of ZrN, TiN, CrN, HfN, TaAlVN, or TaN.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com