| http://www.w3.org/ns/prov#value | - Here, the recording medium that stores the program includes a memory unit, a magnetic disk unit, an optical disk unit, and any other unit capable of recording the program. [0101] (Other Embodiments) [0102] The inspection process in Step S400 shown in FIG. 8 can be implemented for the wafer by use of the system for creating the inspection recipe and the method for creating the inspection recipe, wh
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