About: http://webisa.webdatacommons.org/349370721

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Heater or electrode material, such as TiN, TaN, W, Al, Cu, TiSiN, TaSiN, or other suitable heater or electrode material, is deposited in via 194 between thermal insulation material layers 190a-190d to provide first electrode or heater
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com