http://www.w3.org/ns/prov#value | - Referenced byCiting PatentFiling datePublication dateApplicantTitleUS7189153 *Aug 1, 2005Mar 13, 2007Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS7198561Dec 28, 2005Apr 3, 2007Applied Materials, Inc.Flexible membrane for multi-chamber carrier headUS7255771Mar 26, 2004Aug 14, 2007Applied Materials, In
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