| http://www.w3.org/ns/prov#value | - Herein, as the first conductive film 123 and the second conductive film 124, a conductive film of an element selected from the group consisting of tantalum (Ta), titanium (Ti), molybdenum (Mo), tungsten (W), chrome (Cr), and silicon (Si), or a conductive film of a conductive film mainly composed of the aforementioned element (tantalum nitride film, tungsten nitride film, and titanium nitride film,
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