| http://www.w3.org/ns/prov#value | - Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS6976905 *16 Jun 200020 Dec 2005Cabot Microelectronics CorporationMethod for polishing a memory or rigid disk with a phosphate ion-containing polishing systemUS700125316 Mar 200421 Feb 2006Cabot Microelectronics Corporationan abrasive, a carrier, and either boric acid, or a conju
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