| http://www.w3.org/ns/prov#value | - 20130323924METHODS OF FORMING A PATTERN IN A MATERIAL AND METHODS OF FORMING OPENINGS IN A MATERIAL TO BE PATTERNED - Methods of forming a pattern in a material and methods of forming openings in a material to be patterned are disclosed, such as a method that includes exposing first portions of a first material to radiation through at least two apertures of a mask arranged over the first material,
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