| http://www.w3.org/ns/prov#value | - 20090174118Method and device for nano-imprinting - A nanoimprint system according to one embodiment of the present invention is a system for performing a pattern transfer onto an object to be molded by pressing a mold against the object to be molded using a head, characterized in that the head has a flat pressing surface during pressing the mold and is slid onto the mold while pressing the mold.07
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