| http://www.w3.org/ns/prov#value | - e, etc.The insulating layer 906 may be composed of an insulating material such as silicon oxide, silicon nitride, etc.The heat generating resistive layer 907 may be composed of a metal such as titanium, nickel, chromium, zirconium, hafnium, tantalum, aluminum, etc., an alloy of these metals such as Ni--Cr, Ta--Al, etc., or a material selected from the groupconsisting of carbides, borides and nitri
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