| http://www.w3.org/ns/prov#value | - Decomposable With an Acid and Being Capable of Increasing the Solubility in an Alkali Developing Solution by the Action of an Acid [0107] Component (c) for use in a positive electron beam or X-ray resist composition according to the present invention is a resin having introduced a group decomposable with an acid into the polymer main chain or side chain, or both the polymer main chain and side ch
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