| http://www.w3.org/ns/prov#value | - Hence, when the ArF system excimer laser beam is irradiated on the entire surface portion of the structure shown in FIG. 11A, the Al metal layer 46A in the vicinity of the via hole 47 melts and flows into the via hole 47 to form a plug 58 as shown in FIG. 11B. A polysilicon absorption layer 51A remains on the PSG interlayer insulator layer 44 at a portion other than the vicinity of the via hole 47
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