| http://www.w3.org/ns/prov#value | - ent Application No. 60/838,814, filed Aug. 17, 2006.TECHNICAL DOMAIN AND PRIOR ARTThe invention relates to the field of collective manufacturing of cavities or membranes or micropumps, with high precision dimensional control.The invention is applicable particularly to manufacturing of components made of a semiconducting material, for example silicon requiring a precise volume control, useful for m
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