About: http://webisa.webdatacommons.org/350418853

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring now to FIG. 4, a second CVD SiO2 layer (approximately 2 82 m thick) is deposited over the semiconductor substrate including the trench areas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com