About: http://webisa.webdatacommons.org/35067516

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The liner/wetting/barrier layer may be deposited by conventional methods known to those of ordinary skill in the art such as chemical or plasma vapor deposition, ionized metal plasma, sputtering, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com