| http://www.w3.org/ns/prov#value | - ering light which is reflected from an impurity on the pattern of the inspected object and entered into the pupil of the objective lens with an image sensor, and converting the received image signals indicating the impurity, the analyzing step including analyzing a cause of at least one of a defect and impurity or a factor of at least one of a defect or impurity which incurs a defect or an impurit
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