| http://www.w3.org/ns/prov#value | - Referring to FIGS. 16A and 16B, starting from the structure presented in FIGS. 15A and 15B, in a next step for the definition of the active regions 12, isolation trenches 2 are formed which are filled up with an insulating material, especially silicon dioxide, as has been described with reference to FIGS. 3A and 3B. FIG. 16A shows a top view on the resulting trench capacitor 3 with the isolation t
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