About: http://webisa.webdatacommons.org/350804132

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Resists typically do not adhere properly to untreated surfaces of silicon or silicon-containing materials, such as silicon dioxide and silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	spiedigitallibrary.org