http://www.w3.org/ns/prov#value | - e fully understood by reading the subsequent detailed description and examples with references made to the accompanying drawings, wherein:FIG. 1 is a cross-section of a conventional structure comprising a trench capacitor and a vertical transistor;FIGS. 2A through 2I are cross-sections of a double corner rounding process for a partial vertical cell according to the invention.DETAILED DESCRIPTION O
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