| http://www.w3.org/ns/prov#value | - ember 1104 described herein is disposed between the carrier 1202 and body 1006 of the polishing article 205 for urging the contact member 1204 to a position at least partially above a plane defined by the polishing surface 1002 of the body 1006. [0122] The carrier 1202 is typically formed from a conductive material such as graphite or a metal or other material compatible with process chemistries a
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