| http://www.w3.org/ns/prov#value | - Because the hydroxyl group of the alcoholic hydroxyl group containing polycyclic group is a polar group, use of the structural unit (a3) results in an increased affinity for the entire component (A) relative to the developing liquid, and an improvement in the alkali solubility of the exposed sections of the resist, while also providing excellent resistance to dissolution in the solvents used in im
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