| http://www.w3.org/ns/prov#value | - electrode including a floating gate electrode having a first conductive film, an interelectrode insulating film, a control gate electrode having a stack of second conductive film and a metal film, and a first insulating film disposed one over the other; a sidewall film disposed so as to cover at least sidewalls of the metal film; and a second insulating film covering the memory cell gate electrod
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