PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • eb 2006Applied Materials, Inc.Method and apparatus of eddy current monitoring for chemical mechanical polishingUS70012542 Aug 200421 Feb 2006Micron Technology, Inc.Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpiecesUS700481723 Aug 200228 Feb 2006Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com.au