About: http://webisa.webdatacommons.org/351468420

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, as shown in FIG. 11C, the sacrificial substrate 1106 is removed, such as with heat or by chemical etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com