About: http://webisa.webdatacommons.org/351952589

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A glow discharge plasma (usually RF) is used to generate reactive species, e.g. atoms, radicals and ions, from parent gases.
http://www.w3.org/ns/prov#wasQuotedFrom	bris.ac.uk