About: http://webisa.webdatacommons.org/352099669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, if the active layer and the bottom portion of the bit lines comprise the same material, such as polysilicon, then the etch stop layer is a different material that can be selectively etched compared to polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au